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Molecular Beam Epitaxy Laboratory

North Carolina Agricultural and Technical State University

 

 

 

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Deposition and Device Fabrication Facilities

1.   RF Sputtering System

2.   Semiconductor Measurement Set Up.

3.       Ellipsometer

4.    Photomask aligner

5.     Photoresist application and development systems.

6.      Annealing/alloying furnaces (2), fused silica tubes, inert gas or hydrogen ambient.

7.      A remote plasma etching system for III-V semiconductors

8.     2 Millipore DI water systems.

9.     Various digital multimeters, programmable current source, electrometer, power supplies and     recorders for materials and device characterization.

10.     5 Exhaust fume hoods for chemical etching, cleaning, etc.

11.    Various digital multimeters, Model 450 Gaussmeter with metal transverse gaussmeter probe, electrometer, power supplies and recorders for materials and device characterization

 

MBE Home | Research | People | Prospective Student | Facilities | Publication | Map | Picture | Main Site | MBE Page | Flexible Electronics Page | Nitride Page

MBE Lab., North Carolina A&T State University, Greensboro, NC 27410